High-Temperature Resistance Ceramic Nozzles for 1200 deg C Process Temperatures in LED Industry

Specially developed for LED manufacturing processes, this product is manufactured using 99.8% high-purity silicon nitride (Si₃N₄) through precision gas pressure sintering. Featuring ultra-high cleanliness, high-temperature resistance, and corrosion resistance to meet stringent MOCVD equipment requirements.

LED Manufacturing Applications

• MOCVD equipment: Precise distribution of MO source and NH₃ gas

• Epitaxial growth: Uniform gas injection in reaction chambers

• Chip fabrication: Protective gas delivery systems

• Packaging process: Phosphor spray atomization

• Testing equipment: Optical inspection gas control

LED Industry Advantages

✓ Ultra-high cleanliness: Metal ion content <1ppm
✓ High-temperature resistance: Withstands 1200°C process temperatures
✓ Zero gas contamination: No particulate emission
✓ Precise flow control: ±1% flow accuracy
✓ Extended lifespan: Endures 5000+ thermal cycles

LED-Specific Parameters

Clean Manufacturing Process

1. Material preparation:

   • Nano powder (D50≤0.3μm)

   • Dust-free ball milling (Class 10 cleanroom)

2. Forming and sintering:

   • Isostatic pressing (200MPa)

   • Ultra-clean sintering (Class 100 environment)

3. Post-processing:

   • Plasma cleaning (surface decontamination)

   • Ultrasonic DI water cleaning

4. Packaging:

   • Double vacuum packaging

   • ISO Class 4 clean bags

Usage Guidelines

⚠️ Installation: Class 100 cleanroom operation required
⚠️ Gas control: Use 99.999% high-purity gases
⚠️ Temperature management: Heating rate ≤5℃/min
⚠️ Maintenance: Helium leak test every 500 hours

Specialized Services

• Extended warranty: 18 months

• Cleanliness testing: Free particle emission test

• Rapid response: 12-hour technical support

• Process optimization: Gas flow field simulation

FAQ

Q: How to ensure MO source delivery purity?
A: Triple safeguards:
① Surface Si passivation
② Class 100 clean packaging
③ Pre-installation plasma cleaning

Q: Handling nozzle clogging?
A: Recommended:
• 200W ultrasonic + DI water cleaning
• No mechanical rod cleaning
• Professional cleaning service available

Q: Compatibility with different epitaxial layers?
A: Customizable options:

• Multi-hole array structures

• Gradual bore size designs

• Special angle configurations

We are a company with many years of experience in the production of special precision ceramics and the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics.

Deyu Precision Ceramics Technology Co., Ltd. has many years of experience in producing special precision ceramics, and has the ability to design, manufacture, process and sell structural and functional parts of various special precision ceramics. At present, the company has production and processing equipment such as dry press, isostatic press, experimental furnace, flat kiln, machining center, surface grinder, universal internal and external grinder, centerless grinder and laser cutting machine, as well as complete high-precision testing equipment such as high-precision projector, three-dimensional tester, metallographic microscope, hardness tester and densitometer.

With advanced production technology and complete production facilities, the company is one of the few domestic enterprises that can produce special precision ceramic structural parts and functional parts with machining accuracy less than 2 microns, and has strong core competitiveness in the same industry in China.

Advantages of the company: 1. National new technology enterprises; 2. The company has a municipal R&D center; 3. Cooperation with domestic key universities and research institutes; 4. Design, molding, sintering and precision processing; 5. The products cover alumina, zirconia, silicon nitride, silicon carbide and other precision ceramics; 6. Precision plus technology.

The company has always been standing in the position of customers to solve problems, focusing on the principle of quality and delivery time, adhering to the business philosophy of "integrity, innovation and reassurance", and sincerely looking forward to cooperating with you.